Design for manufacturability through design-process integration II (28-29 February 2008, San Jose, California, USA)Singh, Vivek K; Rieger, Michael L.Proceedings of SPIE, the International Society for Optical Engineering. 2008, issn 0277-786X, isbn 978-0-8194-7110-9, 1 v. (various pagings), isbn 978-0-8194-7110-9Conference Proceedings

Intel Design for Manufacturing and Evolution of Design RulesWEBB, Clair.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 692503.1-692503.8, issn 0277-786X, isbn 978-0-8194-7110-9Conference Paper

Statistical analysis of gate CD variation for yield optimizationHOLWILL, Juliet; KYE, Jongwook; YI ZOU et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 65211P.1-65211P.8, issn 0277-786X, isbn 978-0-8194-6640-2Conference Paper

Unifying the RET design flow with portable modeling informationSWEIS, Jason; STAUD, Wolf; NABER, Bob et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, issn 0277-786X, isbn 0-8194-6358-2, vol 2, 62832V.1-62832V.6Conference Paper

Design for manufacturability through design-process integration (28 February-2 March 2007, San Jose, California, USA)Wong, Alfred Kwok-Kit; Singh, Vivek K.Proceedings of SPIE, the International Society for Optical Engineering. 2007, issn 0277-786X, isbn 978-0-8194-6640-2, 1 v. (various pagings), isbn 978-0-8194-6640-2Conference Proceedings

Double patterning technology : Process-window analysis in a many-dimensional spaceSEZGINER, Apo; YENIKAYA, Bayram.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 652113.1-652113.9, issn 0277-786X, isbn 978-0-8194-6640-2Conference Paper

Layout Patterning Check for DFMCHANG, C. C; SHIH, I. C; LIN, J. F et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 69251R.1-69251R.7, issn 0277-786X, isbn 978-0-8194-7110-9Conference Paper

Maximizing Operational Efficiencies at the Leading EdgeGROSS, Dave.IEEE transactions on semiconductor manufacturing. 2008, Vol 21, Num 4, pp 565-599, issn 0894-6507, 34 p.Conference Paper

Cell-Based OPC with Standard-Cell Fill InsertionLIANG DENG; CHAO, Kai-Yuan; HUA XIANG et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 69251L.1-69251L.8, issn 0277-786X, isbn 978-0-8194-7110-9Conference Paper

DfM, the Teenage YearsLIEBMANN, Lars.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 692502.1-692502.14, issn 0277-786X, isbn 978-0-8194-7110-9Conference Paper

A design method developed for production machinery companiesGOUVINHAS, R. P; CORBETT, J.WDK Publications. 2001, pp 67-74, isbn 1-86058-356-3, 8 p.Conference Paper

ORC and LfD as first steps towards DfMMÄRZ, Reinhard; PETER, Kai; MAURER, Wilhelm et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 62810I.1-62810I.6, issn 0277-786X, isbn 0-8194-6356-6, 1VolConference Paper

Accurate Lithography Analysis for Yield PredictionYERIC, Greg; HATAMIAN, Babak; KAPOOR, Rahul et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 67300S.1-67300S.11, issn 0277-786X, isbn 978-0-8194-6887-1Conference Paper

A combined DFMA and TRIZ approach to the simplification of product structureBARIANI, P. F; BERTI, G. A; LUCCHETTA, G et al.Proceedings of the Institution of Mechanical Engineers. Part B. Journal of engineering manufacture. 2004, Vol 218, Num 8, pp 1023-1027, issn 0954-4054, 5 p.Article

Design and fabrication of an ultrasonic speaker with thickness mode piezoceramic transducersYONGRAE ROH; CHANGHO MOON.Sensors and actuators. A, Physical. 2002, Vol 99, Num 3, pp 321-326, issn 0924-4247, 6 p.Article

Low-pressure-encapsulated resonant structures with integrated electrodes for electrostatic excitation and capacitive detectionCORMAN, T; ENOKSSON, P; STEMME, G et al.Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 160-166, issn 0924-4247Conference Paper

Exposure Tool Specific Post-OPC VerificationSTURTEVANT, John; JAYARAM, Srividya; HONG, Le et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 69250T.1-69250T.9, issn 0277-786X, isbn 978-0-8194-7110-9Conference Paper

Silicon-verified Automatic DFM Layout Optimization : A Calibration-lite Model-based Application to Standard CellsLIN, Kuang-Kuo; WONG, Ban P; DRIESSEN, Frank A. J. M et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 67300X.1-67300X.9, issn 0277-786X, isbn 978-0-8194-6887-1Conference Paper

Practical implementation of via and wire optimization at the SoC levelYUAN, Chi-Min; ASSAD, Guy; JARVIS, Bob et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7275, issn 0277-786X, isbn 978-0-8194-7528-2 0-8194-7528-9, 1Vol, 72750S.1-72750S.8Conference Paper

SEM contour-based Model OPC calibrated with Optically sensitive patternsJUNG, Jee-Eun; LEE, Mi-Kyeong; CHO, Yong-Jin et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 692516.1-692516.10, issn 0277-786X, isbn 978-0-8194-7110-9Conference Paper

Managing design for manufacture and assembly in the development of MEMS-based productsHSU, Hung-Yao; NARASIMHAN, Nachchinarkkinian; HARIZ, Alex J et al.Proceedings of SPIE, the International Societey for Optical Engineering. 2007, pp 64150Z.1-64150Z.12, issn 0277-786X, isbn 978-0-8194-6523-8, 1VolConference Paper

Minimizing poly end cap pull back by application of DFM and advanced etch approaches for 65nm and 45 nm technologiesCALLAHAN, Russell; GRASSHOFF, Gunter; ROLING, Stefan et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 65211Q.1-65211Q.11, issn 0277-786X, isbn 978-0-8194-6640-2Conference Paper

Advanced non-disruptive manufacturing rule checks (MRC)MOORE, Bill; DO, Tanya; MORGAN, Ray E et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 634915.1-634915.10, issn 0277-786X, isbn 0-8194-6444-9, 2VolConference Paper

Intelligent visualization of lithography violationsZIGER, David.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 65211E.1-65211E.10, issn 0277-786X, isbn 978-0-8194-6640-2Conference Paper

Mask manufacturing rules checking (MRC) as a DFM strategyBUCK, Peter; GLADHILL, Richard; STRAUB, Joseph et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 65211V.1-65211V.5, issn 0277-786X, isbn 978-0-8194-6640-2Conference Paper